Calibration Gases for Electronic Industry and Electric Energ
作者：admin 添加时间：2013-01-23 22:14 来源：未知
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Electronic Industuy Mixtures
|
Component Name |
Balance Gas |
|
HCl |
N2、H2、Ar、He |
|
PH3 |
N2、Ar、He |
|
PH3 |
N2、H2、Ar、He |
|
SiH4 |
N2、H2、Ar、He |
|
SiH4 |
N2、H2、Ar、He |
|
Cl2 |
N2、Ar、He |
|
NH3 |
N2、H2、Ar、He |
|
CF4 |
N2、H2、Ar、He |
|
AsH3 |
N2、H2、Ar、He |
|
AsH3 |
N2、H2、Ar、He |
|
B2H6 |
N2、H2、Ar、He |
|
B2H6 |
N2、H2、Ar、He |
|
CO |
SF6 |
|
H2 |
N2 |
|
NF3 |
N2、H2、Ar、He |
|
Zn(C2H5)2 |
N2、H2、Ar、He |
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Calibration Gases for Electric Energy
|
Component Name |
Balance Gas |
|
CH4 C2H2 C2H4 C2H6 H2 CO CO2 |
N2 |
3．Electric and Light Source Mixtures
|
Component Name |
Balance Gas |
|
N2 |
Ar |
|
Kr |
Ar |
|
CH3Br Kr |
Ar |
|
Ne |
Ar |
|
CH3Br Kr N2 |
Ar |
|
Kr Ar |
N2 |
|
CH3Br CH2Cl2 |
Kr |
|
Ar |
Ne |
